ALD簡介
原子層沉積技術(shù)(Atomic Layer Deposition,簡稱ALD)是一種在納米尺度上進(jìn)行薄膜沉積的先進(jìn)技術(shù)。通過將物質(zhì)以單原子形式一層一層的鍍在基底表面,擁有優(yōu)異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點。

ALD應(yīng)用

ALD在能源領(lǐng)域應(yīng)用
2009年,Miyaska課題組將鈣鈦礦材料MAPbI3用作燃料敏化太陽能電池的光伏活性層,正式開啟了鈣鈦礦太陽能電池的新紀(jì)元。ALD憑借其均勻成膜性、精準(zhǔn)控制厚度和保形性等多種優(yōu)勢,在光伏領(lǐng)域中發(fā)揮著重要作用。除此之外,ALD技術(shù)還可用于鋰電池薄膜涂層,提高電池性能。


ALD在泛半導(dǎo)體應(yīng)用
隨著泛半導(dǎo)體行業(yè)的發(fā)展,對微型化和集成化要求越來越高,尺寸縮小至亞微米和納米量級,ALD作為一種高精度薄膜沉積技術(shù),可用于晶體管柵極電介質(zhì)層(高K材料)、金屬柵電極、有機(jī)發(fā)光顯示器涂層、銅互聯(lián)擴(kuò)散阻擋層、DRAM電介質(zhì)層、微流體和MEMS涂層、傳感器等眾多領(lǐng)域。

ALD在光學(xué)領(lǐng)域應(yīng)用
由于 ALD 具有的三維共形沉積和大面積均勻性特點,已成功應(yīng)用于高質(zhì)量光學(xué)薄膜、增透膜、折射率可調(diào)的光學(xué)薄膜、波狀多層膜,改善了光子晶體的光學(xué)性質(zhì)和可控性,增加了光子晶體在未來光學(xué)器件中的應(yīng)用潛力。

公司致力于ALD高純半導(dǎo)體薄膜前驅(qū)體材料的自主研發(fā)和生產(chǎn),成立以來,已陸續(xù)向多家半導(dǎo)體客戶提供了百余種前驅(qū)體新材料,包括高純硅基前驅(qū)體系列、High-k前驅(qū)體系列產(chǎn)品,部分新品已被客戶用于5nm以下制程薄膜設(shè)備。我們致力為客戶提供優(yōu)質(zhì)的產(chǎn)品并建立互信、長久的合作關(guān)系,產(chǎn)品具有自主知識產(chǎn)權(quán)且原材料國產(chǎn)化,打破國外壟斷的同時保證供應(yīng)鏈的安全。研峰科技愿與國內(nèi)芯片、高端顯示、光伏新能源等高端客戶一起攜手,解決高端半導(dǎo)體材料的把脖子難題,早日實現(xiàn)進(jìn)口替代。
| Chemical Name | (Trimethyl)methylcyclopentadienylplatinum(IV), (MeCp)PtMe3 |
| Synonym |
(Trimethyl)methylcyclopentadienylplatinum(IV)
Methylcyclopentadienyl-tridimethyl-platinum
(Methylcyclopentadienyl)trimethylplatinum
MeCpPtMe3
Platinum, trimethyl[(1,2,3,4,5-η)-1-methyl-2,4-cyclopentadien-1-yl]-
三甲基(甲基環(huán)戊二烯基)鉑(IV) |
| PubChem Substance ID | 24883390 |
| CAS Number | 94442-22-5 |
| MDL Number | MFCD00079665 |
| Chemical Name Translation | 三甲基(甲基環(huán)戊二烯)鉑(IV) |
| InChIKey | AGQKROMSWCHOND-UHFFFAOYSA-N |
| Hazard Codes |
T+,N |
| WGK Germany | 3 |
GHS Symbol
| Precautionary statements | |
- P264 Wash hands thoroughly after handling. 處理后要徹底洗凈雙手。
- P273 Avoid release to the environment. 避免釋放到環(huán)境中。
- P301+P310
- P302+P350
- P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護(hù)手套/防護(hù)服/眼睛的保護(hù)物/面部保護(hù)物。
- P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或醫(yī)生/醫(yī)師。
- P391 Collect spillage. Hazardous to the aquatic environment 收集對水環(huán)境有危害的泄漏物。
- P301+P310+P330
- P302+P352+P310
- P333+P313
|
| Hazard statements | |
- H400 Verytoxictoaquaticlife 對水生生物毒性非常大。
- H317 May cause an allergic skin reaction 可能導(dǎo)致皮膚過敏
- H300+H310
|
| Personal Protective Equipment |
Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
| Signal word |
Danger |
| Safety Statements | |
- S61 Avoid release to the environment. Refer to special instructions/safety data sheet 避免釋放到環(huán)境中,參考特別指示/安全收據(jù)說明書;
- S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發(fā)生事故時或感覺不適時,立即求醫(yī)(可能時出示標(biāo)簽);
- S28 After contact with skin, wash immediately with plenty of ... (to be specified by the manufacturer) 皮膚接觸后,立即用大量…(由生產(chǎn)廠家指定)沖洗;
- S36/37 Wear suitable protective clothing and gloves 穿戴適當(dāng)?shù)姆雷o(hù)服和手套;
|
| Risk Statements | |
- R50 Very toxic to aquatic organisms 對水生生物極毒
- R43 May cause sensitisation by skin contact 皮膚接觸會產(chǎn)生過敏反應(yīng)
- R27/28 Very toxic in contact with skin and if swallowed 皮膚接觸及吞食都有劇毒
|
| Restrict |
- |
{uni_hamburg} Short: III/35C4
Title: Nuclear Magnetic Resonance (NMR) Data: Chemical Shifts and Coupling Constants for Hydrogen-1, Part 4: Inorganic and Organometallic Compounds
Author: Gupta, R.R.; Platzer, N.
Editor: Gupta, R.R.; Lechner, M.D.
Source: Landolt-B?rnstein, New Series
Volume: III/35C4
Year: 2001
Keyword: Hydrogen 1; Nuclear Magnetic Resonance
ISBN: 3-540-41059-7
ISBN: 978-3-540-41059-1
Internet Resource: DOI:10.1007/b76570
RefComment: VII, 299 pages. With CD-ROM. Hardcover
Abstract: This volume provides a comprehensive and evaluated compilation of nuclear magnetic resonance data. Chemical shifts and coupling constants of boron-11 and phosphorus-31 (subvol. A), fluorine-19 and nitrogen-15 (subvol. B), hydrogen-1 (subvol. C), and carbon-13 (subvol. D) compounds are tabulated together with the gross- and structure formulas and the most readily available solvents. Due to the large amount of the data merely chemical shifts are presented in the printed versions, and all the data, chemical shifts and coupling constants are provided on CD-ROM's.
{uni_hamburg} Short: III/35D5
Title: Nuclear Magnetic Resonance (NMR) Data: Chemical Shifts for Carbon-13, Part 5: Organometallic Compounds
Author: Mikhova, Bozhana
Editor: Gupta, R.R.; Lechner, M.D.
Source: Landolt-B?rnstein, New Series
Volume: III/35D5
Year: 2008
Keyword: Carbon-13; chemical shift; magnetic properties of nuclei; nuclear magnetic resonance data
ISBN: 978-3-540-74188-6 (print)
ISBN: 978-3-540-74189-3 (electronic)
Internet Resource: DOI:10.1007/978-3-540-74189-3
RefComment: VIII, 241 p., Hardcover
RefComment: Written for Scientists and engineers in the fields of physics, chemistry and physical chemistry who intend to use NMR to study the structure and the binding of molecules
Abstract: Nuclear Magnetic Resonance (NMR) is based on the fact that certain nuclei exhibit a magnetic moment, oriented by a magnetic field, and absorb characteristic frequencies in the radiofrequency part of the spectrum.